图4.70 溅射硅片表面注入的氩的Ar2 p峰(https://www.daowen.com)
推荐资料
Moulder J F,Stickle W F,Sobol P E,Bomben K D.Handbook of X-ray Photoelectron Spectroscopy[M].Minnesota:Perkin-Elmer Corporation,1992.